TEL Tokyo Electron 381-639506-4 restriction board
Product manual:
Product Name: TEL Tokyo Electron 381-639506-4 Restriction Board
Function type: Limiter Board (signal/power limit protection module)
1、 Main functions
Control and limit voltage, current, or signal amplitude to prevent equipment damage due to exceeding rated parameters
Provide overload protection and signal clamping functions to ensure stable system operation
Support collaboration with the main control system or I/O interface board for real-time protection and abnormal disconnection
2、 Typical application areas
Internal protection system for semiconductor equipment
Used for safety restrictions on critical control signals in TEL devices
Prevent equipment abnormalities caused by interference from power sources, electrical signals, electromagnetic waves, etc
Ion implantation equipment
Limiting the current/voltage of high-energy beams or high-voltage components
Protecting the safety of ion sources, control electrodes, and target wafer areas
Plasma Etcher equipment
Limit high-frequency signal input to avoid interference or damage to RF circuits
Thin film deposition equipment (such as CVD, ALD systems)
Ensure the safe working voltage range of plasma sources, electric heating systems, and gas sensors
Photolithography equipment
Limit the electrical load of the exposure system and protect the light source drive circuit
Temperature control and vacuum control unit
Limit the range of feedback control signals to avoid abnormal temperature or vacuum changes caused by sensor failures
3、 Application advantages
Avoid equipment damage caused by transient currents or voltage surges
Extend the lifespan of critical components in equipment
Improve production process stability and increase yield
Implement a security protection mechanism that highly matches TEL devices
Product details picture:
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