TEL Tokyo Electron 381-64060-1 restriction board
Product manual:
TEL Tokyo Electron 381-64060-1 restriction board
Product Category: Limiter Board
Manufacturer: Tokyo Electron (TEL)
Model: 381-64060-1
1、 Main functions
Signal protection: Limit voltage, current, or noise to prevent circuit damage.
Signal conditioning: Maintaining communication or control signals within a safe range.
Static electricity suppression: prevents electrostatic discharge (ESD) from affecting the backend electronic module.
Module isolation: It serves as a signal buffer or electrical isolation to reduce interference.
2、 Typical application areas
Circuit protection in semiconductor equipment
Commonly used for signal transition protection between internal modules such as CVD, Etch, PVD, and cleaning systems.
Wafer processing system
Limit surge signals in wafer handling, heating, cooling, or vacuum chamber interfaces.
RF/High Frequency Power Supply System
Used to protect the RF link on the channel from the RF power output to the plasma chamber.
Control interface of vacuum equipment
Prevent equipment misoperation caused by power fluctuations or external interference in control signals.
Lithography/development system interface module
Connect actuators and control boards in lithography machines or development systems to limit the impact of abnormal signals.
3、 Examples of Applicable Devices (TEL)
Trias, Unity Pro series CVD systems
Tactras series etching equipment
ACT12, Lithium and other cleaning and developing equipment
ALD and other front-end equipment such as diffusion furnace systems
Product details picture:
381-640600-1
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