TEL Tokyo Electron 381-640841-3 Digital Input Module
Product manual:
Product Name: TEL Tokyo Electron 381-640841-3 Digital Input Module
Manufacturer: Tokyo Electron Ltd
1、 Main functions:
381-640841-3 is a digital input module used in TEL semiconductor equipment, responsible for collecting external switch signals, such as:
Safety door opening and closing detection
Mechanical limit switch status
Air pressure or vacuum sensor switch status
Flow valve switch status
Status feedback of IO control devices
2、 Technical characteristics (inferred from the universal design of TEL module):
Input type: Digital signal (dry contact or voltage input, usually 24V DC)
Number of channels: possibly 8, 16, or 32 input channels
Signal isolation: Optocoupler isolation
Installation method: Backboard plug-in card, specifically designed for internal control systems of TEL devices
Communication method: Collaborate and communicate with other modules through the TEL device main control platform (such as PLC, industrial control motherboard)
3、 Application scenarios:
This module is typically used for the following Tokyo Electron devices:
Coater/Developer
CVD, Etch, PVD systems
Wafer handling and wafer loading system
Cavity control system
Safety interlock logic control circuit
4、 Maintenance points:
Check if the wiring is secure and avoid virtual connections or short circuits
The input signal must meet the specified electrical parameters to avoid overvoltage
Regularly clean module slots to avoid poor contact caused by dust
Module faults can be identified through device diagnostic systems or LED indicator lights
Product details picture:
381-640841-3
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