TEL Tokyo Electron 3D80-00157-23 Power Supply Unit
Product manual:
The TEL Tokyo Electron 3D80-00157-23 power supply unit is a specialized power/control module for semiconductor equipment,
The EPD (Exposure Graphics Equipment) series, which belongs to TEL company, is a part of the key equipment power control system.
Brief introduction
This power supply unit is used to provide stable power output for TEL devices,
And perform power management and signal control on the core modules of the equipment to ensure stable operation of core processes such as exposure and graphic etching.
It is mainly used in TEL's wafer processing equipment, especially in the exposure equipment control system.
2、 Main application areas
Semiconductor manufacturing factory
Applied in key process equipment such as wafer lithography and pattern transfer, providing power for the core circuit of the equipment.
Commonly used in exposure and graphic processing equipment on 12 inch and 8-inch wafer manufacturing lines.
Process development and equipment integration
Used in equipment development platforms or engineering prototypes to provide precise power control for control systems, actuators, etc.
Semiconductor equipment maintenance and replacement
As one of the 3D80 series power supply units, it is commonly used for modular replacement or fault repair of existing TEL old equipment, extending the equipment lifecycle.
Research and Teaching Laboratory
Some research institutions or university laboratories use TEL's outdated equipment for photolithography
The power supply unit, as a component of the equipment, plays a stable power supply role in basic experiments such as thin film deposition.
3、 Typical adaptive devices
EPD Exposure Pattern Device
Control host in TEL wafer processing platform
Power distribution and signal control system
Product details picture:

3D80-001570-23
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