TEL Tokyo Electron 3D81-000020-15 Printed Circuit Board
Product manual:
Product Name:
TEL Tokyo Electron 3D81-000020-15 Printed Circuit Board (PCB)
Product type:
Electronic control module/printed circuit board
Main application areas:
Semiconductor Manufacturing Equipment
Used for semiconductor equipment under Tokyo Electron, such as CVD, Etcher, PVD systems.
Implement functions such as process control, data acquisition, and signal scheduling.
Wafer processing system
Control the actions of wafers during transportation, alignment, and handling.
Support precision control and status feedback of equipment.
Vacuum system control
Applied in control or monitoring circuits for high vacuum environments.
Connect components such as vacuum sensors, MFC (Mass Flow Controller), heating elements, etc.
I/O control and device communication
Serve as an input/output interface module, connecting sensors, actuators, motors, and other components.
Responsible for data exchange and system synchronization control.
Automation Control and Safety Management
Provide protection and control functions such as alarm, temperature control, and interlocking.
Adapt multiple modules to work together and improve the stability and safety of device operation.
Typical industries of use:
Semiconductor Manufacturing
Production of optoelectronic devices
Precision instruments and equipment
Display manufacturing (OLED/LCD)
Product details picture:
3D81-000020-15
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