TEL Tokyo Electron 3M08-027471-11 Interface Module
Product manual:
Product Name: TEL Tokyo Electron 3M08-027471-11 Interface Module
Equipment type: Interface control module/I/O module
Manufacturer: Tokyo Electron Ltd
1、 Main application areas
Semiconductor Manufacturing Equipment
Applied to the front-end process equipment of Tokyo Electron, such as:
Etcher equipment
Chemical Vapor Deposition Equipment (CVD)
Atomic layer deposition equipment (ALD)
Modules are used as signal interaction interfaces between control systems, sensors, and actuators.
automatic control system
Control the start and stop status of devices such as air valves, pumps, heaters, and coolers.
Implement equipment interlocking logic management and safety control.
I/O signal processing
Process external input/output digital and analog signals.
Connect PLC and main control board to achieve process status monitoring and response.
Wafer Handling System (EFEM/FOUP Interface)
Manage the automatic transfer process of wafers between devices.
Receive status signals from the wafer transfer system.
Clean room equipment interface
Used for standardized interface connections between equipment in clean rooms to ensure communication and synchronous operation.
2、 Typical Function Overview
Digital/Analog Input/Output Interface
Electrical isolation and protection function
Communication protocol support (such as TEL proprietary interfaces RS232/422/485）
Fault detection and status indication function
PCB architecture that is hot swappable or easy to maintain
Product details picture:
3M08-027471-11
More related products:
Gespac GESOUT-3 OUT-3B Controller Module
GE IS210AEBIH1BED interface card module
Kollmorgen MMC-SD-0.5-230-D servo drive
