TEL Tokyo Electron 3M80-001588-12 processor module
Product manual:
TEL Tokyo Electron 3M80-001588-12 processor module
Belonging equipment
Suitable for Tokyo Electron semiconductor manufacturing equipment, especially as part of the SW300B system.
Module function
This module belongs to the AIO2 (Multi functional Input/Output) sub board and is installed on the main control board (such as 32M81-023609-15). It is responsible for:
Data collection and transmission
Control logic processing
Signal input/output coordination
Collaborate with other submodules to complete system control tasks
application area
Widely used in Tokyo Electron's etching machines, thin film deposition equipment, cleaning systems, and other semiconductor front-end process equipment to perform the following tasks:
Control gas flow rate, temperature, voltage, current and other parameters
Receive sensor signals and transmit them to the main control system
Control the logical behavior of executing components (such as vacuum valves, RF power output, etc.)
Technical characteristics (speculation)
Due to being a dedicated module, detailed parameters have not been disclosed, but it generally has the following characteristics:
High reliability industrial grade PCB
Used in conjunction with the main control board, not running independently
Having certain anti-static and anti-interference capabilities
Communicate with the system using a specific bus or proprietary protocol
Product details picture:
TEL Tokyo Electron 3M80-001588-12
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