TEL Tokyo Electron E244-010015-11 Central Controller Module
Product manual:
Product Name: TEL Tokyo Electron E244-010015-11
Type: Central Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Main application areas
Semiconductor manufacturing equipment control system
Used in TEL brand dry etching (Etch), CVD, ALD, cleaning, photolithography and other equipment,
Responsible for equipment core control and process management.
Multi module coordination and communication management
Control the coordinated operation of various subsystems such as gas supply system, vacuum chamber, temperature control module, motion components, etc;
Efficient data exchange with various control boards through bus interfaces or custom communication protocols.
Process logic control
Realize timing control and execution judgment of automatic process flow;
Ensure process sequence, operational accuracy, and parameter consistency to improve yield.
Real time data processing and alarm linkage
Real time collection and processing of sensor data such as pressure, temperature, flow rate, and current;
Trigger an alarm or linkage protection mechanism based on logical judgment results (such as turning off power, cutting off gas, etc.).
Equipment operation log and system diagnosis
Record key parameters, operating steps, and fault information during operation;
Providing historical tracing and operational diagnostic support helps with fault analysis and process optimization.
Communication and remote interface support
Support communication with upper computer (such as SECS/GEM protocol) for centralized management and remote monitoring of production lines;
Can be integrated into MES system to achieve manufacturing informatization and automation.
2、 Typical usage equipment (partial)
TEL Unity and Telius series etching equipment
TEL Trias, Expediaus, Alpha series CVD/ALD systems
Product details picture:
E244-010015-11
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