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TEL Tokyo Electron XPC-T0090A-11 Interface Board

TEL Tokyo Electron XPC-T0090A-11 Interface Board

Product manual:

The TEL Tokyo Electron XPC-T0090A-11 interface board is a professional electronic module used in semiconductor manufacturing equipment,
It is one of the key components in the high-precision equipment of Tokyo Electron (TEL).
This interface board mainly undertakes functions such as signal transmission, communication between devices, and module control,
Commonly used in the following core application areas:

🔧 Product application areas
1. Front End Equipment for Semiconductor Manufacturing
Specific equipment: Etchers, CVD/PVD deposition equipment
Wet stations, heat treatment furnaces, etc.

Application function: Implement the main control system and various sensors
Accurate signal exchange of actuators and inter module connections.

2. Wafer processing system
For example, wafer transfer systems, load ports, wafer alignment and handling modules.

Function: Used to coordinate communication between the robotic arm and the sensing module, ensuring precise wafer handling.

3. Automated control system
Including: PLC control unit, motion control card, logic judgment circuit, etc.

Function: XPC-T0090A-11 can serve as a signal interface board,
Responsible for connecting multiple input and output ports to achieve automated process control.

4. Process monitoring and data acquisition system
For example, real-time temperature, air pressure, and vacuum monitoring systems.

Function: The interface board connects various analog/digital sensors,
Transmit critical data to the main system to achieve closed-loop control.

5. Communication bridge between machine modules
In the modular device architecture of TEL,
Different subsystems need to achieve high-speed data exchange through interface boards to ensure real-time synchronization and collaboration between modules.

🧩 Summary of Characteristics
High speed data transmission capability;

Multi channel signal input/output support;

Stable electrical isolation and anti-interference design;

Compatible with multiple original TEL platforms such as UNITY, CELLESTA, Trias.