Tokyo Electron 3D80-000710-V3 Cooling Machine Component
Product manual:
The Tokyo Electron 3D80-000710-V3 cooling unit component is a critical thermal management unit used in semiconductor manufacturing equipment,
Its main function is to effectively control and dissipate the heat generated inside the device,
Ensure the stability and performance of the system under high-precision and high load operation.
The following is a detailed analysis of its product application areas:
1、 Main application areas
Semiconductor Etching Systems
The cooling machine component is used to control the temperature of the reaction chamber and prevent overheating during plasma processing.
Ensure the temperature control accuracy of process gas reaction and improve the consistency of etching patterns.
Chemical vapor deposition systems (CVD, PECVD, SACVD, etc.)
Lithography Equipment
Used to cool the light source module or exposure stage substrate of the exposure system, ensuring exposure accuracy.
Maintain system thermal stability and reduce thermal drift errors during high repetition rate operations.
Wafer Transfer&Alignment Systems
Provide cooling for motor driven components or conveying robotic arms to extend equipment lifespan.
Maintain a constant temperature to improve wafer alignment accuracy and mechanical response speed.
Vacuum pump and cooling circulation system
Coupled with the process pump system, serving as an auxiliary thermal management unit during process operation.
Control the temperature inside the vacuum chamber to improve the efficiency of the pumping system.
2、 Typical application environment
Role of Application Platform Function Support
TEL Unity and Trias series temperature control subsystems maintain thermal balance in the chamber
Temperature stability control in TEL Clean Track series photoresist development process
TEL Vigus and Eagle series etching and deposition process chamber temperature control components
Independent cooling modules for each cavity in the Cluster Tool platform's multi cavity module
Product details picture:
Tokyo Electron 3D80-000710-V3
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